Molecular growth paths and dust‐particles nucleation precursors in Ar/C <sub>2</sub> H <sub>2</sub> low pressure discharges

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چکیده

A numerical model was used to investigate the effect of acetylene concentration in feed gas on molecular growth and solid particle nucleation argon-acetylene CCRF discharges. Results showed that for large conversion yields small concentrations discharge, ionization kinetic is driven by Penning process governed neutral polyynes. The cluster size distribution predicted shows unlikely this situation. On contrary, limited significant electron-impact process; positive ions leads polyynes enhanced rate.

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ژورنال

عنوان ژورنال: Plasma Processes and Polymers

سال: 2022

ISSN: ['1612-8869', '1612-8850']

DOI: https://doi.org/10.1002/ppap.202100204